NIST aids 'liquid lens'; chip surge helps cleanrooms; SPIE launches digital library; ASTM opens up standards; books cover films, defects AMD buys National Semi unit; Air Products purchases Ashland electronic chem business; managers to buy out WWK; Schlumberger team launches metrology firm; DuPont forms materials unit; Oxford gets Thermo VG; Edlon inks plastics pact with 3P Meeting process and equipment challenges in MEMS deep silicon-etch processes Photomask cleaning tool, wafer transfer/loadlock system, cordless vacuum wafer wand, enclosed adjustable-speed drives, pressure regulator, integrated metrology tool, cleanroom-compatible filters, liquid optical particle counter, storage system/stocker, extractive gas monitor, ESD monitoring system, machine control system, mechanical vacuum pump, field emission SEMs, continuous gas-emission monitor Vendor releases new version of wafer-mapping software; supplier awarded pressure transducer, flow control patents; noncontact measurement system upgraded to include Windows 2000; manufacturer augments fluoropolymers with new grades; software permits real-time control of robots, motion controllers; vendor offers Website product tour for fiber types, contactor designs Data dump of the first order Metology market heads for $4B; SEMI elects Chamillard; Immersion tools see progress; gloves, cots RP published TI plans new
Products & Services
Semiconductor Metrology Instruments
Semiconductor metrology instruments are designed for wafer and thin film in-line inspection after semiconductor processing. They include capacitance gages, C-V systems, electron beam probes, ellipsometers, interferometers, I-V system, magnetometers, optical systems, profilometers, reflectometers, resistance probes, RHEED systems, and X-ray diffractometers.
Wafer and Thin Film Instrumentation
Instruments such as quartz crystal microbalance (QCM) monitors, ellipsometers, RHEED systems, imaging stations, CD-SEMs, ion mills, C-V systems specifically designed for wafer metrology or in-situ monitoring of thin film parameters during thin film or semiconductors wafer processing.
Semiconductor Cluster Tools
Semiconductor cluster tools and equipment are used to process semiconductor wafers for the production of microelectronic components.
Lithography equipment transfers circuit or device patterns onto a substrate using a patterned mask and a beam of light or electrons to selectively expose a photoresist layer. Overlay metrology systems align the pattern masks or reticules.
Thin Film Equipment
Thin film equipment uses vacuum processing for the modification of surfaces using CVD, PVD, plasma etching, and thermal oxidation or ion implantation.
Topics of Interest
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