MICRO: Spotlight

IFC integrated flow controller performs closed-loop flow control for high-purity chemicals, point-of-use dispense, and CMP slurries. Available in flow ranges from 5 ml/min with quick response to control within 1% of full-scale accuracy, the controller is for use in corrosive environments. It has PTFE wetted surfaces and encapsulated electronics. By delivering simultaneous pressure and flow measurements, the unit enables users to monitor process parameters and set alarms. (S.F., North Hall, Booth 5944A) The VCA-3000 contact-angle analyzer from incorporates computerized video imaging with contact-angle measurement to evaluate wafer surface conditions. Included is a high-resolution camera and magnifying lens with high-intensity LED lighting for precise image capture. (S.F., North Hall, Booth 5160) designs and manufactures x-ray-based tools for the semiconductor manufacturing industry. The company's total reflection x-ray fluorescence equipment, TREX, is used to measure very small amounts of contamination (parts-per-billion levels) on or near the wafer surface. S-Mat tools, which determine film thickness, density, surface roughness, interface roughness, and composition, combine several x-ray techniques, including x-ray reflectivity, x-ray fluorescence, and grazing incident x-ray fluorescence. This powerful combination of techniques provides a nondestructive way to study thin films. (S.F., South Hall, Booth 2830) MicroPlanarSTI2100 for shallow-trench isolation (STI) processes contains chemical activator, inhibitor, planarizer (cAiP), which allows slurry to preferentially remove the protruding topography or active area in an STI pattern without dishing the recessed, or trench, area. The formulation also features AutoStop, which automatically stops removing the fill oxide when planarization is reached, preventing overpolishing. (S.F., South Hall, Booth 417) The HPS Integrated LoPro (ILP) two-stage valve from is a vacuum poppet valve and a bypass valve in a single unit. The valve's compact size and ultracompact limit-switch option assure that it will fit into tight spaces. The ILP does not use a soft-start bypass line, which takes up space and often clogs,