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A series of surface-conditioning units provide BEOL postash, damascene copper, and low-k cleaning for advanced technology nodes. The ZETA 200BE and 300BE are compatible with a range of semiaqueous solvents, solvents, and other chemistries, and possess a sealed nitrogen-purged process environment. A rapid solvent-to-rinse transition eliminates corrosion and the need for an isopropyl alcohol intermediate rinse. The small-footprint units are available fully automated for 200- and 300-mm manufacturing or as a 200-mm semiautomated unit. Assorted miniweld and face-seal fittings are available in various materials, including Type 316L stainless steel, Vim-Var, and C-22. These fittings have a clean, smooth surface finish and include various types of glands, elbows, tees, crosses, bulkhead unions, nuts, and gaskets. The standard finish is 10 Ra or less, and a surface finish of less than 5 Ra with or without electropolish is also offered. A 300-mm wafer carrier features a detachable handle and fits inside dry transport systems to minimize handling. The carrier is molded and machined from polytetrafluoroethylene resin and exhibits virtually no degradation from harsh chemicals such as aqua regia, sulfuric acid, hydrochloric acid, and ammonia. The seamless one-piece carrier is free of microvoids and porosity and has no pins, screws, or dovetails that can loosen or trap contaminants. The MapTrak Express series of 300-mm sorters are configurable for two and four BOLTS load ports. These units can handle FOUPs, FOSBs, and reduced-pitch FOSBs. The sorters can be programmed to support 200-mm SMIF pods and cassettes. A user-friendly interface and AMHS communications software are incorporated into the units. Options include a choice of filter systems, character reading systems, macro inspection, stocker integration, language interfaces, and loadport configurations. Additional options include minienvironment features such as pressure and airflow control. A laser spectroscopic ellipsometer has a modular platform, a
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Products & Services
Expansion Joints
Expansion joints connect two fixed assemblies or pipes and provide allowance for movement due to service load, shock, or thermal cycles.
Sorting Equipment
Sorting equipment is used to separate dissimilar items into predetermined groupings as part of an automated process.
Polishing and Buffing Machines
Polishers and buffing machines are used to impart a fine (low Ra) surface finish on the exterior of a part. To improve surface finish, they use use abrasive grain slurries or compounds on buffs, bobs, cloth naps, laps, very fine grit nonwovens, and coated abrasives.
Resurfacing, Recoating, and Refinishing Services
Resurfacing, recoating and refinishing services alter or restore damaged coatings and surfaces to a usable condition.
Product Announcements
FLSmidth - Abrasion Resistant Fittings - Plastics Industry
FLSmidth Abrasion Resistant Pipeline Fittings are designed to meet the stringent durability demands required when conveying abrasive polymer materials. FLSmidth has designed a diamond shape interior... (read more)
SUSS MicroTec - LithoPack300 Cluster
Lithography Cluster for Wafer Level Packaging The LithoPack300 (LP300) lithography cluster consists of an MA300 mask aligner module linked to an ACS300 spin-coating system. LP300 is specifically... (read more)
Topics of Interest

An enhanced version of GW Associates GWconX300 300-mm connectivity software from Asyst solves communications challenges associated with wafer-fabrication tools that use an internal buffer or...

Leo Archer and Sally-Ann Henry, A research project investigates the use of a sulfuric acid/peroxide/hydrogen fluoride mixture in place of organic chemicals to remove postash polymer residue from BEOL...

new platform for the ZETA system is 30% smaller than earlier versions of the surface conditioning tool and more than 40% smaller than batch immersion systems. Models 200FE and 300FE are designed for...

new platform for the ZETA system is 30% smaller than earlier versions of the surface conditioning tool and more than 40% smaller than batch immersion systems. Models 200FE and 300FE are designed for...

Kirk Mikkelsen and Tracy Niebeling, Both seal and filter capabilities affect the performance of FOUPs, but tests show that well-designed pods can protect 300-mm wafers from exposure to particles. As...