Top 40 Product All-Stars for 1997, as selected by reader response. The products range from carriers to cleanroom window film, CMP tools to transducers. Congratulations to this year's winners! Wafer and substrate carriers can be molded from various PTFE or PTFM formulations and machined with slots and sections to ±0.005 in. Carrier configurations range from compact low-mass styles that minimize contact with wafers to fully supported cassettes for 300-mm wafers. Unaffected by temperatures from 450° to 500°F, the carriers have no pins, screws, or dovetails that can trap contaminants. Their low coefficient of friction diminishes particle shedding. The XGC system uses three abatement stages to thoroughly scrub highly toxic and pyrophoric gases from process effluent gas streams. The three stages are a spray chamber, an Eductor venturi stage, and the Waterweb mesh. The mesh system comprises thousands of microventuri passages for maximum scrubbing efficiency. The system's blowerless construction is designed to safely handle hydrogen carrier gas, and an inlet humidity arrestor prevents backstreaming of gas and humidity to inlet piping. The low-energy system can be used in CVD, PECVD, RIE, and plasma-etch applications. A high-purity transducer is fully rated for NEMA 4 service. The Model 332 pressure sensor can be mounted on gas pads or in gas bunkers at semiconductor facilities. Available in pressure ranges from 030 to 05000 psi, the model has a compensated temperature range of 0°160°F and thermal error of ¾0.0006%°F. Each transducer comes with a four-year warranty. Mill lengths and sizes of all 300-series stainless-steel and aluminum tubes and pipes are available from stock for quick delivery. Nickel/nickel-based alloy tubing and pipe also can be ordered from stock. The supplier can provide custom-cut metric and fractional sizes. Prototype and mill quantities can be supplied. All pipes and tubes meet ASTM, AMS, and MIL-T specifications. SVR 200/300 robots
Products & Services
Cryogenic equipment produces or is used in the production of very low temperature materials or processes.
Fuels and Fuel Products
Fuels and fuel products include gasoline, diesel oil, natural gas, propane, coal, fossil fuels, biofuels and other combustible fluids or materials.
Gas, Liquid, and Solids Samplers
Gas samplers, liquid samplers and solids samplers are used to take samples of media from process streams, reactors or storage vessels.
Industrial gases are pure elements, molecular compounds or mixtures that are gaseous or vaporous at room temperature and pressure.
Topics of Interest
Selete, the Japanese 300-mm consortium, is evaluating a high-current ion implanter from Varian Associates. The SHC-80 implanter has been installed at Selete's facility in Kanagawa. According to...
Equipped with a front-opening unified pod, the V 300-SL surface profiler enables users to monitor process wafers in a fully automated environment. Stylus-based measurement technology provides step...
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New energy-efficient turbosystems run at high temperatures but can still benefit from use of engineering plastics. Edited by Jean M. Hoffman Polyamide 46 has been widely used for charged air cooler...
A new-generation lithography tool is used in air bearing surface (ABS) patterning of thin-film-head rowbar applications. The Model 1900 tool has a theta stage design that provides refined accuracy and...