PRODUCT ALLSTARS

Top 40 Product All-Stars for 1997, as selected by reader response. The products range from carriers to cleanroom window film, CMP tools to transducers. Congratulations to this year's winners! Wafer and substrate carriers can be molded from various PTFE or PTFM formulations and machined with slots and sections to ±0.005 in. Carrier configurations range from compact low-mass styles that minimize contact with wafers to fully supported cassettes for 300-mm wafers. Unaffected by temperatures from —450° to 500°F, the carriers have no pins, screws, or dovetails that can trap contaminants. Their low coefficient of friction diminishes particle shedding. The XGC system uses three abatement stages to thoroughly scrub highly toxic and pyrophoric gases from process effluent gas streams. The three stages are a spray chamber, an Eductor venturi stage, and the Waterweb mesh. The mesh system comprises thousands of microventuri passages for maximum scrubbing efficiency. The system's blowerless construction is designed to safely handle hydrogen carrier gas, and an inlet humidity arrestor prevents backstreaming of gas and humidity to inlet piping. The low-energy system can be used in CVD, PECVD, RIE, and plasma-etch applications. A high-purity transducer is fully rated for NEMA 4 service. The Model 332 pressure sensor can be mounted on gas pads or in gas bunkers at semiconductor facilities. Available in pressure ranges from 0—30 to 0—5000 psi, the model has a compensated temperature range of 0°—160°F and thermal error of ¾0.0006%°F. Each transducer comes with a four-year warranty. Mill lengths and sizes of all 300-series stainless-steel and aluminum tubes and pipes are available from stock for quick delivery. Nickel/nickel-based alloy tubing and pipe also can be ordered from stock. The supplier can provide custom-cut metric and fractional sizes. Prototype and mill quantities can be supplied. All pipes and tubes meet ASTM, AMS, and MIL-T specifications. SVR 200/300 robots