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INDUSTRY NEWS New definition, advanced defect detection tools are keys to highway Experts steering the latest revision of the National Technology Roadmap for Semiconductors to its autumn publication date assert that advanced defect detection technolo

Chipmakers will require detection, inspection, and review technologies with particle sensitivities between 0.18 and 0.10 µm at greater throughputs than are currently available, according to the team heading up the defect reduction technology crosscut working group. The coordinating body also emphasizes that the tools will need some degree of artificial intelligence, such as automated defect classification and factory-integrated data management. Developing these capabilities will bring the industry closer to the total-system solution required for next-generation defect detection and prevention. Based on a cursory review of the earlier roadmaps, this assertion is one of three "key messages" discussed in a draft of the 1997 revision, which is once again being prepared by the Semiconductor Industry Association (SIA). First published in 1992 and revised in 1994, the SIA document focuses on the technologies required to manufacture successive generations of semiconductors to 2010. The roadmap
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Topics of Interest

National Technical Roadmap for Semiconductors addresses the entire yield learning process, including the impacts on device performance and reliability. The four focus topics—yield modeling and...

and Kenneth W. Tobin, The semiconductor industry is constantly refining new technology generations and the plans required to realize them. The 1999 revision of the industry's plan, The International...

Fewer defects than ever before are being found on wafers in state-of-the-art manufacturing fabs. Improved detection methods and tools have enabled the identification of killer defects closer to their...

and E. Dan Hirleman, Defect detection is considered a critical component of the defect reduction cycle. This motivated the defect reduction technology subgroup of the Crosscut Technology Working...

Key areas of the 2001 edition of the ITRS focus on the yield model and defect budget, defect detection and characterization, yield learning, and wafer environment contamination control. n the ongoing...