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Phenom Imaging By Backscattered Electron Detection

From FEI Company
 

 

Every sample emits several types of electrons (signals) when hit by a primary electron beam. One type of these emitted electrons is the backscattered electron (BSE). The most commonly used detector is the solid state type (semiconductor device).

The solid state backscattered detector in the Phenom is mounted between the sample and the objective lens (see Figure 1). The electron beam passes through the middle of the detector and amplifies the signal produced by the impinging electrons. The result is a gray scale image based on the contrast produced by the sample. Because the Phenom image is electronically produced, it can be subject to all kinds of post image analysis.

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