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Using Permeation Tubes to Prepare Trace Moisture Standards in Reactive Gases
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From Kin-Tek Laboratories Inc.
The measurement of trace concentrations of water vapor in reactive gases has become very important in the semiconductor manufacturing industry. Techniques for measuring low ppm and ppb moisture in NH3, HCl, and other reactive gases have been developed, but producing standards for system calibration and data validation remains a problem. Permeation tubes have proven to be an effective method for creating trace moisture standards in inert process gases such as nitrogen. This paper describes adaptation of the permeation tube method to produce trace moisture standards in reactive matrices. Product Announcements
Topics of Interest
Moisture standards have traditionally been prepared by techniques which saturate the gas at known conditions. Preparing standards at trace concentrations (low ppm, ppb) requires saturation at...
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S.IPSALE
FINE Permeation Tubes, Messina, ITALY
N.DONATO
Dept. of Matter Physics and Advanced Technologies and INFM, University of Messina, ITALY
G. NERI, A.BONAVITA, G.RIZZO, S.GALVAGNO...
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Analyzers for monitoring water quality in processor waste water streams require calibration with liquid standards. Traditional techniques for preparing these standards are cumbersome and often...
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When the analysis is for product quality monitoring or personnel safety assurance, the concentrations measured are often in the ppb to low ppm levels. At these low concentrations, the loss of analyte...
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Maintaining reliable standards for trace sulfur compounds in an olefin matrix is a common problem in industrial quality assurance. Using permeation tubes to dynamically blend the required mixtures...
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