Hoping to capitalize on the predicted growth of MEMS (microelectromechanical systems) technology, the Fraunhofer Institut Siliziumtechnologie (ISiT; Itzehoe, Germany) has formed a partnership with Standard MEMS Inc. (SMI; Burlington, MA, USA), a developer and manufacturer of MEMS technology. Under the agreement, Standard MEMS acquires the exclusive right to commercialize ISiT's silicon and MEMS intellectual property and know-how, and it will have full access to the institute's development facilities and personnel. Widely considered to be a pioneer in silicon-based R&D, ISiT has developed microsystems for medical applications as well as airbag-triggering mechanisms. Its new partner is an integrated high-volume MEMS supplier to companies in various market segments including the medical and biomedical sectors. Prior to announcing the partnership with ISiT, Standard MEMS established a business unit focussed on serving the needs of the biomedical and biotechnology communities. The BioMEMS group, according to the firm, will work to further the application of MEMS technology to pathogen detection, highly precise surgery, biosensors, gene sequencing and analysis, and microfluidic applications. Clearly, access to ISiT's resources will benefit this group. Anton Heuberger, the head of ISiT, cast the partnership as an opportunity for the German institute to profit from a market with a predicted growth rate of more than 20% in some areas. "SMI is an established MEMS company with a wide customer base," says Heuberger. "We will jointly explore new applications and uses for MEMS research which we lack the skill to bring to market acting alone," he adds. For more information, contact ISiT, Fraunhoferstr. 1, D-25524 Itzehoe, Germany; phone: +49 48 21170; fax: +49 48 21174250; e-mail: Medical-grade compounds lubricated with DuPont Fluoroguard MG polymer additives feature improved flow properties and enhanced processability and throughput. The products were recently introduced by Foster Corp. (Dayville, CT, USA), which reached an agreement with DuPont to use
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MEMS devices integrate mechanical components, electronics, sensors and actuators on a semiconductor material, chip, or wafer.
MEMS Processing Equipment
MEMS processing equipment is used to create micro-electro-mechanical systems (MEMS) sensors and wafers.
Lithography equipment transfers circuit or device patterns onto a substrate using a patterned mask and a beam of light or electrons to selectively expose a photoresist layer. Overlay metrology systems align the pattern masks or reticules.
MEMS foundry services suppliers design and manufacture microelectromechanical devices on a contract basis, in prototype to production quantities.
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Semiconductor foundry services suppliers design and manufacture semiconductor chips on a contract basis, in prototype to production quantities.
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Hoping to capitalize on the predicted growth of MEMS (microelectromechanical systems) technology, (Burlington, MA) has formed a partnership with the Fraunhofer Institute for Silicon Technology (ISiT;...
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