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Leak Testing Meets - New Semiconductor Industry Needs

From Alcatel Vacuum Products, Inc.
 

 

Helium leak detectors have evolved quite dramatically in recent years. Thanks to the electronics revolution, expanded features and interface capabilities have become more user friendly and more suitable for advanced applications, such as those found in the semiconductor industry.

Manufacturing integrated circuits requires many complex steps that use high-purity gases inside process chambers under vacuum conditions. To maintain the purity of these gases and the integrity of wafer surfaces during each manufacturing step, the semiconductor industry began switching to so-called "dry" vacuum pumping packages in the early 1990s.

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Mechanical vacuum pumps and systems contain devices such as pistons, claws, scrolling spirals, and diaphragms to isolate and compress air. Search by Specification | Learn more about Mechanical Vacuum Pumps and Systems
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Thin film equipment uses vacuum processing for the modification of surfaces using CVD, PVD, plasma etching, and thermal oxidation or ion implantation. Search by Specification | Learn more about Thin Film Equipment
Rotary vane vacuum pumps and systems move media through the pump using a rotating assembly in the pumping chamber. Typically, there are two or more rotating vanes that move the media from inlet to outlet. Rotary vane vacuum pumps are positive displacement pumps. Search by Specification | Learn more about Rotary Vane Vacuum Pumps and Systems
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Product Announcements
Alcatel Vacuum Products, Inc. - Powerful Dry Leak Detector ASM 182TD+; ASM 192T2D+
ASM 182 TD+ and the ASM 192 T2D+ Powerful Dry Leak Detectors Once more, Alcatel Vacuum Products, Inc. has designed the most powerful and sensitive dry leak detectors on the market today to meet new... (read more)
Oerlikon Leybold Vacuum USA Inc. - Leak Detector
PhoeniXL 300 – New Helium Leak Detector from Leybold Vacuum A mobile helium leak detector which is equally well suited for use in series-production testing and in service. For use in many... (read more)
Alcatel Vacuum Products, Inc. - Lightweight Portable Helium Leak Detectors
Superior helium leak detector performance that Alcatel customers have come to expect is now available in a portable unit, the Adixen ASM 310! Thanks to its light weight of only 46 pounds and a very... (read more)
Alcatel Vacuum Products, Inc. - Particle Free, Dry Vacuum Pump Solutions
ACP series 2 : Particle Free, Dry Vacuum Pump Solutions Adixen announces the only vacuum pump of its type on the market today that can provide an oil less, clean, dry and particle free vacuum pump... (read more)
Alcatel Vacuum Products, Inc. - HELIUM RUGGED DRY SNIFFING LEAK DETECTORS
Helium Rugged Dry Sniffing Leak Detectors ASM 142 Series delivers unmatched features for a entry-level unit such as,a roughing capacity of 10 m3/h (7 cfm) with a usable helium sensitivity in the 10-11... (read more)
INFICON - Residual Gas Analyzers (RGAs)
INFICON residual gas analyzers (RGAs) are used as diagnostic tools to aid process engineers in continuously monitoring the manufacturing process for the presence of contaminant gases and for verifying... (read more)
Fluitron, Inc. - Diaphragm Compressors
Metal diaphragm compressors feature freedom from contamination and leakage of the process gas, making them ideal for handling toxic, explosive, flammable, high purity, corrosive, radioactive or... (read more)
INFICON - Helium Leak Detectors
Setting the standard for reliability and ease of operation, helium leak detectors are available for a wide range of applications-from pinpointing small leaks in high-vacuum systems to heavy-duty... (read more)
Alcatel Vacuum Products, Inc. - ROOTS VACUUM PUMPS: RSV SERIES
The Alcatel Roots Pumps are suited to a wide range of vacuum applications. In combination with primary vane pumps, or dry pumps, they achieve low pressures with high pumping speeds. (read more)
 
Topics of Interest
Helium leak detectors have evolved quite dramatically in recent years. Thanks to the electronics revolution, expanded features and interface capabilities have become more user friendly and more... (Read More)
Source gas and point-of-use (POU) purification of process gases is necessary to meet the stringent demands of the semiconductor industry. Gas purity levels are tested in the cylinder at the production... (Read More)
Contamination control in etch processing is one of the key issues in the semiconductor industry. Even the highest-purity etch gases are known to contain volatile metal species in addition to trace... (Read More)
Over forty years ago, Thornton designed and manufactured the original analog resistivity meters for high purity water. Thornton later pioneered microprocessor-based resistivity instrumentation with... (Read More)
An AMHS is utilized to transport and store carriers within a semiconductor factory. There are a variety of carriers as well as AMHS components utilized in the semiconductor industry each of which... (Read More)
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