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Novel Passivation Ledge Monitor in an InGaP HBT Process

From Skyworks Solutions, Inc.

The HBT ledge thickness and quality is vital for
device performance and reliability. In this work we
report on a measurement technique and test structure
for monitoring the emitter passivation ledge based on the
use of TaN as a barrier between the InGaP ledge surface
and the top metal contact. The technique is suitable for
the manufacturing environment.

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Capacitors are electronic components used for storing charge and energy. In their simplest form, capacitors consist of two conducting plates separated by an insulating material called the dielectric.
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