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Mass Spectroscopy of Metastable Atomic Species in Gas Analysis and Processing Plasmas at High Spectrometer Source Pressures - AVS 2011

From Hiden Analytical

The availability of particle counters which may be operated at ambient pressures of up to 2x10-4 Torr is highly desirable in many current research
applications. In one field in particular, it allows mass spectroscopy of gas analysis and processing plasmas to be performed using pressures of this
order in the quadrupole mass spectrometer (QMS). These pressures are much closer to those of many processing plasmas so that the sampling of
neutral species, in particular, from the plasma is improved. The sampling of ion and neutral species from magnetron plasmas is a good example...

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Topics of Interest

The availability of particle counters which may be operated at ambient pressures of up to 2x10-4 Torr is highly desirable in many current research applications. In one field in particular, it allows...

Among the techniques in common use for mass spectrometric studies of processing plasmas, the so-called 'threshold ionisation' (TI) method for examining the neutral species generated in a plasma has...

The use of atmospheric plasmas is growing in interest due to their advantage in processing materials, mainly organic, which are not suitable for high vacuum. Such discharges are commonly studied by...

Plasmas contain complicated mixtures of charged and neutral species. It is clearly important for the design and control of any surface engineering process that the user has as much information as...

Atmospheric pressure plasma jets and its applications for material processing and biomedical treatment are of main interest recently in nonthermal plasma research [1]. Normally this kind of plasmas is...