From MEMS Packaging

T.R.Hsu and J.S.Custer


This chapter intends to set the tone for several subsequent chapters in the book. It begins with an overview of MEMS and microsystems and their representative products that are available in the current marketplace. The authors offer their views on why the packaging and assembly of these products have become major cost factors in the production of MEMS and microsystems. Major challenging issues related to MEMS and microsystems packaging will be outlined. In the authors view, research institutions and industries have not effectively dealt with some of these issues, such as assembly tolerances and product testing. A generic packaging process flow is offered to provide readers with a perspective on the extent of the tasks involved in this important stage of production.


The term MEMS is an abbreviation of microelectromechanical system. Any human-made device that contains parts or components of size ranging from 1 m to 1 mm that perform an engineering function or functions by electromechanical means is classified as MEMS [1].

Microsystems involve MEMS, which include micro sensors, actuators of all kinds, and the auxiliary integrated circuits for device function controls and signal transductions, conditioning and processing, function control systems, etc. Microsystems are expected to perform complex engineering functions, which may not necessarily be limited to those of an electromechanical nature. Typical MEMS and microsystems products are presented in this chapter [1].

1.2.1 Commercially available MEMS

  1. Micro sensors:

    • Acoustic wave sensors for sensing chemicals.

    • Biomedical sensors for sensing...

Products & Services
MEMS Devices
MEMS devices integrate mechanical components, electronics, sensors and actuators on a semiconductor material, chip, or wafer.
MEMS Foundry
MEMS foundry services suppliers design and manufacture microelectromechanical devices on a contract basis, in prototype to production quantities.
MEMS Processing Equipment
MEMS processing equipment is used to create micro-electro-mechanical systems (MEMS) sensors and wafers.
Tilt Sensors
Tilt sensors measure tilt angle with reference to the earth’s ground plane.
Tilt Switches
Tilt Switches are electric switches in which an electrical circuit is made by mercury or other device flowing or moving into a gap when the device tilts to a pre-specified angle.

Topics of Interest

T.R.Hsu and J.Clatterbaugh 2.1 CHAPTER SCOPE This chapter presents the working principles of both surface and wire bonding techniques that are essential to MEMS and microsystems packaging. Special...

Dr. Rajeshuni Ramesham Jet Propulsion Laboratory/ California Institute of Technology Dr. Reza Ghaffarian Jet Propulsion Laboratory/ California Institute of Technology Prof. Farrokh Ayazi Georgia...

There's a big future in small things, according to Helmut Detter, head of the department of precision mechanics at the Technical University of Vienna. As one of the coordinators of the Micro Moulding...

G. K. Ananthasuresh, Ph.D. Assistant Professor of Mechanical Engineering and Applied Mechanics University of Pennsylvania, Philadelphia, Pa. 15.1 SCOPE OF THE CHAPTER Even though the word mechanical...

J.S.Custer, A.D.Oliver and M.V.Collins 4.1 CHAPTER SCOPE The goal of packaging is to combine MEMS and other components into a product suitable for being used, either in the next level of assembly or...