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Microscopy of Biological Sections using a Low Voltage STEM Technique (S-5200 SEM 102)

From Hitachi High Technologies America, Inc.
 

 
A low voltage STEM technique using a scanning electron microscope (SEM) allows high contrast images owing to high electron scattering and making visible subtle changes of densities and compositions in specimen structures. This technique has long been used for microscopy of unstained polymers. Recently, this technique has been used also for semiconductor materials associated with specimen preparation using FIB systems. TEM technique has been playing a leading role for microscopy of biological sections. We have used the S-5200 ultra-high resolution scanning microscope with STEM attachment for microscopy of biological sections. We have examined if it is possible to observe biological sections with good imaging contrast. We have also studied X-ray microanalysis of unstained sections. We report here on some of our initial results.
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Various combinations of materials which have different compositions or hardness have been studied for development of advanced (functional) new materials. For microscopy of these materials, specimen... (Read More)
Process evaluation of semiconductor devices requires cross-sectional observations using SEMs for optimizing exposures and/or etching conditions. For this purpose wafers need to be fractured for... (Read More)
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STEM (Scanning Transmission Electron Microscopy) on a conventional SEM is a useful tool for biological applications. With the Hitachi STEM detector on the S-4800 FESEM images, comparable to a... (Read More)
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