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From hitachi-hta.com
When imaging semiconductors specimens containing photo resist Hitachi’s S-4700 New ExB Filter can reduce charge appearance so that discrete atomic differences can be distinguished. By selectively filtering out the low energy electrons that contain information about the very surface of the specimen, where charge is prevalent, the appearance of charge can be eliminated. By using the new ExB Filter the image contrast becomes compositional in nature. At low accelerating voltages (2kV) the specimen can be examined for compositional information while charge is removed from the image and beam drift is reduced at the sample.
The following micrographs demonstrate the usefulness of the new E X B filter:
1. To reduce charge in the image. (At the area of the photoresist)
2. To enhance compositional contrast. (Visible layering of materials)
3. To image very small atomic layers in a semiconductor device. (At the area of ZrO2)
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Electron microscopes use a focused beam of electrons instead of light to "image" the specimen and gain information as to its structure and composition.
Microscopes are instruments that produce magnified images of small objects
Charged coupled device (CCD) image sensors are electronic devices that are capable of transforming a light pattern (image) into an electric charge pattern (an electronic image).
Video cameras take continuous pictures and generate signals for display or recording. They capture images by breaking them down into a series of lines. This search form does not include consumer devices such as camcorders.
Charge coupled device (CCD) cameras contain light-sensitive silicon chips that detect electrons excited by incoming light. They also contain micro circuitry that transfers a detected signal along a row of discrete picture elements or pixels, scanning the image very rapidly. CCD cameras use two-dimensional CCD arrays with many thousand of pixels.
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