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Introduction of the S-4300SE SEM with Features and Some Applications (S-4300SE SEM 101)

From Hitachi High Technologies America, Inc.
 

 
New analytical techniques such as cathodoluminesence (CL) and electron backscattered diffraction pattern (EBSP) have been brought into scanning electron microscopy (SEM) in addition to high resolution observations. The S-4300SE has been developed in view of these new analytical applications. Fig. 1 shows a general view of the S-4300SE. It allows simple addition of CL, EBSP, and EDX detectors for a variety of applications. We report on features of the S-4300SE and some applications using the CL as well as EBSP systems. The large S-4300SE allows a probe current of 25 nA (maximum) at 20 kV. It is useful for analytical and other applications that require a large probe current.
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