Oxygen Removal from Water to 3 ppb at IMEC

IMEC (Interuniversity MicroElectronics Center) in Belgium is Europe's largest independent research center. It focuses on microelectronics, nanotechnology, and enabling design methods and technologies for ICT (Integrated Circuit Technology) systems. IMEC's research runs 3 to 10 years ahead of industrial needs. IMEC's technology choices for process manufacturing steps used for project and process development reflect their commitment to using the best solutions available to them.

Projects are currently underway at IMEC to address major technological challenges for CMOS chips of the 100 and 65 nanometer generation. The center has three full-scale pilot manufacturing lines and 4800 M2 (51,666 ft2) of clean room facilities. As future devices become smaller and as line widths become more critical, so too do the technologies required to produce high purity water for the process manufacturing steps in various microelectronics industries. Oxygen levels in the high purity water directly impact the product yields. New roadmaps for 300mm wafers and other small devices point to requirements of <1 ppb of dissolved oxygen.