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Fifty Years of Vacuum Technology Marked by Evolutionary Advances

From Edwards Vacuum
 

 

Vacuum technology is not often considered as leading semiconductor manufacturing. However, a look back at the last 50 years reveals that it has played an essential supporting role. Complex interactions between vacuum and manufacturing technologies have inspired the transition to dry pumps and the evolution of turbomolecular pumps. Meanwhile, vacuum processes have increased in number as fabs moved to producing ICs with tighter device geometries.

Products & Services
Instruments such as quartz crystal microbalance (QCM) monitors, ellipsometers, RHEED systems, imaging stations, CD-SEMs, ion mills, C-V systems specifically designed for wafer metrology or in-situ monitoring of thin film parameters during thin film or semiconductors wafer processing. Search by Specification | Learn more about Wafer and Thin Film Instrumentation
Vacuum valves are used when a vacuum must be maintained in a closed system. Search by Specification | Learn more about Vacuum Valves
Specialty or proprietary products and accessories related to vacuum pumps, lines, and processing. Learn more about Specialty Vacuum Equipment
Vacuum gauges are devices for measuring vacuum or sub-atmospheric pressures. Search by Specification | Learn more about Vacuum Gauges and Instruments
Ion beam guns and electron beam guns produce beams of electrons, ions or other particles for use in chemical and surface analysis, particle physics, resin curing or semiconductor manufacturing. Learn more about Ion Beam Guns and Electron Beam Guns
Product Announcements
Alcatel Vacuum Products, Inc. - Adixen ATP 2300 Maglev Turbo Pump
The Adixen ATP 2300 M is an active 5 axis maglev turbomolecular pump that has been specially designed for Hydrogen and light gas pumping. (read more)
EBARA Technologies, Inc. - EMT Series Turbomolecular Pumps
The EMT Series offers five major types of turbomolecular pumps - temperature-controlled, corrosion resistant, ultra low vibration, radiation resistant, and ultra high vacuum. (read more)
Oerlikon Leybold Vacuum USA Inc. - Leybold Pump Repair for all Brands
Leybold Vacuum USA is now servicing all brands of vacuum pumps including Aerzen, Alcatel, Anest-Iwata, Balzers, Busch, CTI, Dresser Roots, Ebara, Edwards, Kinney/Tuthill, Pfeiffer-Balzers, Stokes,... (read more)
Oerlikon Leybold Vacuum USA Inc. - SV16BI Rotary Vane Vacuum Pump
Export, PA - March 2009 - Oerlikon Leybold Vacuum introduces the SOGEVAC® SV16 BI, a compact single-stage rotary vane vacuum pump for Analytical Applications including Mass Spectrometry. SOGEVAC SV16... (read more)
Alcatel Vacuum Products, Inc. - ATH-M Series Maglev Hybrid Turbomolecular Pumps
The ATH-M series are hybrid magnetically leviated turbo pumps. These very sophisticated high performance and extremely robust pumps are recognized as the new reference in the world of large... (read more)
Oerlikon Leybold Vacuum USA Inc. - Scroll Vacuum Pumps
Export, PA, Spring 2005 – Leybold Vacuum USA has introduced the Scrollvac line of oil-free vacuum pumps that provide a process and environmentally friendly alternative to traditional oil-sealed... (read more)
Oerlikon Leybold Vacuum USA Inc. - TURBOVAC SL Series Turbomolecular Vacuum Pumps
TOKYO — Sept. 3, 2008 — Oerlikon Leybold Vacuum GmbH, a leading supplier of advanced vacuum systems for use in manufacturing and analytical processes, today introduced to the Asian market... (read more)
Alcatel Vacuum Products, Inc. - Packtel 1025 Turbomolecular Pumping System
The Packtel 1025 is a compact, pumping system that pumps from atmosphere to 10-5/10-8mbar, incorporating a 7 or 30 l/s turbomolecular pump with a 5 m3/h Pascal rotary vane pump. (read more)
Topics of Interest
This presentation gives an overview of the technology of contemporary primary and secondary mechanical vacuum pumps. For reference a brief history of vacuum and a summary of important and basic vacuum... (Read More)
This article provides an introduction on how to apply the principles of ATEX legislation and its supporting documentation to the internal flammable atmospheres associated with vacuum pumps. (Read More)
Restoring and customizing cars and trucks is a laborious process that demands skill and attention to detail. Even with weeks of meticulous work, highly skilled individuals are unable to approach... (Read More)
As the use of vacuum-based equipment in industrial applications continues to grow, vacuum pump system life cycle costs are increasingly scrutinised. Andrew Chew of Edwards, outlines the factors that... (Read More)
Chapter List Chapter 1: The Umbrella Perspective on Communication Technology August E. Grant, Ph.D. Chapter 2: Communication Technology Timeline, Dan Brown, Ph.D. Overview August E. (Read More)
See more product announcements for Wafer and Thin Film Instrumentation
Thin Film Measurement System

Thin Film Measurement System
StellarNet, Inc.


Wafer Inspection Systems

Wafer Inspection Systems
Olympus America Inc.


Wafer Measurement System

Wafer Measurement System
MTI Instruments Inc.


11 See more product announcements for Wafer and Thin Film Instrumentation