From Edwards Vacuum
Vacuum technology is not often considered as leading semiconductor manufacturing. However, a look back at the last 50 years reveals that it has played an essential supporting role. Complex interactions between vacuum and manufacturing technologies have inspired the transition to dry pumps and the evolution of turbomolecular pumps. Meanwhile, vacuum processes have increased in number as fabs moved to producing ICs with tighter device geometries.
Products & Services
Product Announcements
|
|
||||||
|
|
Topics of Interest
3.1 INTRODUCTION Vacuum pumps, either singly or, more usually, as part of a pumping system, create and maintain the conditions appropriate to a required process. Each of the types of vacuum pump...
3.3 HIGH/ULTRA-HIGH VACUUM PUMPS It is now increasingly common to have high-vacuum systems based on turbomolecular pumps (TMPs), turbomolecular pumps + cryosurfaces, or cryopumps. Diffusion pumps...
Automatic Guided Vehicle Systems are one of the most exciting and dynamic areas in material handling today. But AGVS is really not so new. Fifty years ago when AGVS was invented it was then called...
As the use of vacuum-based equipment in industrial applications continues to grow, vacuum pump system life cycle costs are increasingly scrutinised. Andrew Chew of Edwards, outlines the factors that...
With every increase in wafer size and decrease in device geometry has come a change in how wafers are handled. Production cleanrooms are now Class 1, and standard mechanical interface (SMIF)...
