From Edwards Vacuum
As the volume of compound semiconductor (CS) processing ramps up, driven primarily by demand for new light emitting diode (LED) products, manufacturers must deal with a variety of process gas abatement challenges. Indeed, many of the materials used in CS processes are particularly noxious or dangerous to handle, requiring abatement solutions that are robustly designed for both safety and reliability. At the same time, much of the increased demand is for products destined for price-sensitive consumer markets, so the pressure to reduce costs is much higher than in the high-performance and military applications that have historically been the focus of CS development.
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