Go to GlobalSpec.com Home
Toolbar   The Engineering Toolbar
The Ultimate Resource for Engineering and Technical Research. (Learn More)

Mechnical Vacuum Pump Selection Considerations for Ion Pressure Nitriding, Plasma Nitriding and Nitro Carborising

From Edwards Vacuum
 

 

Low pressure nitriding applications typically involve the use of ammonia gas as the source of nitrogen. Careful consideration of material selection is needed for the vacuum pump system. In addition the process can generate significant quantities of hydrogen gas. Careful consideration of the dilution and removal of this explosive gas is needed for the vacuum pump system. In the plasma process there is the additional consideration of using nitrogen, argon and in particular water, which presents significant challenges to the safe and reliable operation of the vacuum pump system. This paper presents various solutions to these application challenges and provides guidance on how to select the right solution in low pressure and plasma nitriding.

Products & Services
Instruments such as quartz crystal microbalance (QCM) monitors, ellipsometers, RHEED systems, imaging stations, CD-SEMs, ion mills, C-V systems specifically designed for wafer metrology or in-situ monitoring of thin film parameters during thin film or semiconductors wafer processing. Search by Specification | Learn more about Wafer and Thin Film Instrumentation
Vacuum valves are used when a vacuum must be maintained in a closed system. Search by Specification | Learn more about Vacuum Valves
Specialty or proprietary products and accessories related to vacuum pumps, lines, and processing. Learn more about Specialty Vacuum Equipment
Vacuum gauges are devices for measuring vacuum or sub-atmospheric pressures. Search by Specification | Learn more about Vacuum Gauges and Instruments
Ion beam guns and electron beam guns produce beams of electrons, ions or other particles for use in chemical and surface analysis, particle physics, resin curing or semiconductor manufacturing. Learn more about Ion Beam Guns and Electron Beam Guns
Product Announcements
Edwards Vacuum - EDWARDS ANNOUNCES iXH NEXT-GENERATION VACUUM PUMP
Edwards, a leading global supplier of vacuum and abatement equipment and services, today introduced the new iXH series of vacuum pumps, the next-generation in its industry-leading family of harsh... (read more)
Pascal Engineering Inc. - Quick Die Cast Mold Change From Pascal
- Features of Pascal Die Cast Clamp System - Well-Covered Clamp Cylinder Heat-Proof Ideal Treatment Against Rust Long Clamping Storke... (read more)
Alcatel Vacuum Products, Inc. - Adixen ATP 2300 Maglev Turbo Pump
The Adixen ATP 2300 M is an active 5 axis maglev turbomolecular pump that has been specially designed for Hydrogen and light gas pumping. (read more)
Edwards Vacuum - Sirius™ 6000 Abatement System
Edwards, a leading global supplier of vacuum and abatement equipment and services, today introduced the Sirius™ 6000 abatement system. Designed for low cost-of-ownership, the Sirius 6000 system... (read more)
Edwards Vacuum - Turbo pump for compact, efficient vacuum systems
Leading manufacturer of vacuum equipment for scientific applications, Edwards, has launched a new pump for laboratory vacuum systems. The EXT406PX turbomolecular pump allows a customer to build... (read more)
Cosa Instrument Corporation - Orthodyne Continuous Analyzers and Chromatographs
Continuous measurement of Nitrogen in Argon or Helium based on the luminosity of an Argon or Helium plasma in a quartz chamber. (read more)
GDS, Inc. - Orbital Welding for the Industrial Sector
GDS Inc. performs on-site orbital welding installations for the Industrial sector. (read more)
Oerlikon Leybold Vacuum USA Inc. - SV16BI Rotary Vane Vacuum Pump
Export, PA - March 2009 - Oerlikon Leybold Vacuum introduces the SOGEVAC® SV16 BI, a compact single-stage rotary vane vacuum pump for Analytical Applications including Mass Spectrometry. SOGEVAC SV16... (read more)
Edwards Vacuum - EDWARDS ANNOUNCES 1,000TH MILESTONE SALE
Edwards, a leading global supplier of vacuum and abatement equipment and services, today announced that it has sold 1,000 iXH harsh process vacuum pumps to semiconductor and solar manufacturers since... (read more)
Alcatel Vacuum Products, Inc. - Packtel 1025 Turbomolecular Pumping System
The Packtel 1025 is a compact, pumping system that pumps from atmosphere to 10-5/10-8mbar, incorporating a 7 or 30 l/s turbomolecular pump with a 5 m3/h Pascal rotary vane pump. (read more)
Topics of Interest
Emerging applications, such as thin-film solar cell manufacturing in the solar industry and silicon/silicon germanium (Si/SiGe) epitaxy in the semiconductor industry, are using increasing levels of... (Read More)
3.3 HIGH/ULTRA-HIGH VACUUM PUMPS It is now increasingly common to have high-vacuum systems based on turbomolecular pumps (TMPs), turbomolecular pumps + cryosurfaces, or cryopumps. Diffusion pumps... (Read More)
B Back-diffusion (vacuum technology) Flow of vapor in a direction opposite to that of the flow of gas being pumped. Occurs in the molecular flow range. Also called Backstreaming. Back-end... (Read More)
The need to operate under vacuum is widespread throughout the chemical process industries (CPI). Distillation, drying, flash cooling, stripping, and evaporation are among the unit operations that... (Read More)
vacuum A low-pressure gaseous environment whose pressure is lower than the ambient atmospheric pressure. vacuum brake A type of power-assisted vehicle brake. Its released position is... (Read More)
See more product announcements for Wafer and Thin Film Instrumentation
Wafer Measurement System from MTI Instruments

Wafer Measurement System from MTI Instruments
MTI Instruments Inc.


Wafer Inspection Systems

Wafer Inspection Systems
Olympus America Inc.


Thin Film Measurement System

Thin Film Measurement System
StellarNet, Inc.


11 See more product announcements for Wafer and Thin Film Instrumentation