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Towards the Single Pump Solution - Recent Development in High Speed Machines for Dry Vacuum Pumping

From Edwards Vacuum
 

 

The goal of a single _dry_ pump capable of reaching high vacuum and itself exhausting to atmospheric pressure has long existed in the vacuum field. The development of a single-shaft, high-speed pump EPX _second generation_ mechanism has gone some considerable way to achieving this goal. The pump exploits molecular drag and a fluid dynamic mechanism and is discussed in terms of the theory of operation, internal flow mechanisms and the technology innovations enabling the mechanism to be produced in large volume quantities.

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Topics of Interest
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