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F-105 Wet Scrubbers Installed at Semiconductor Wafer Fab in Singapore

From Met-Pro Corporation
 

 

In order to comply with Ministry of the Environment emission requirements, Project Engineers at Chartered Silicon Partners, Singapore (CSP) needed gas scrubbers for their FAB-6 expansion. They required six (6) new 40,000 CFM scrubbers with chemical addition and high efficiency mist eliminators to treat acidic process exhaust.

CSP also required that each scrubber be supplied with an energy efficient exhaust fan. After thorough analysis of equipment features and benefits, CSP selected Duall model F105 scrubbers complete with redundant recycle pumps and Duall NH fans. All equipment was constructed of UV-PP to provide maximum corrosion resistance and weather protection for outdoor installations subjected to Singapore's intense sunlight and tropical climate.

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