From Post-Processing Techniques for Integrated MEMS

1.1 Introduction

Microelectromechanical systems (MEMS) is an enabling technology that implements techniques similar to traditional integrated circuit fabrication processes to realize highly miniaturized devices that can ultimately integrate a number of functions including mechanics, electronics, optics, and fluidics on a single silicon chip [1 7]. MEMS merge sensing, actuating, and computing into miniature systems that enable enhanced levels of perception, control, and performance. The major attraction of MEMS technology is the order of magnitude reduction of power and thermal requirements over existing electronic components. Recent advances in MEMS technology have made it possible to produce pressure, acceleration, humidity, and temperature sensors having masses in the milligram range or even lighter (excluding the package).

The tremendous evolution of MEMS has had a direct impact on wireless communication as it enabled the realization of a new generation of high-performance radio frequency MEMS (RF-MEMS) to replace off-chip passives such as high-Q inductors, ceramic and surface acoustic wave (SAW) filters, varactor diodes and discrete PIN diode switches [8 11]. The integration of MEMS into traditional RF circuits will result in systems with superior performance levels and lower manufacturing costs. The incorporation of MEMS-based fabrication technologies into micro and millimeter wave systems offers viable routes to integrated circuits (ICs) with MEMS actuators, antennas, switches, and transmission lines. The resultant systems are expected to operate with an increased bandwidth and increased radiation efficiency and have considerable scope for implementation within the expanding area of wireless personal communication devices. From a future prospective, the integration of sensors and RF...

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Topics of Interest

2.1 Introduction The use of MEMS in such applications as infrared detectors [1, 2], accelerometers [3], gyroscopes [4], and RF-MEMS [5, 6] is continuously increasing. Monolithic integration of MEMS...

Dr. Rajeshuni Ramesham Jet Propulsion Laboratory/ California Institute of Technology Dr. Reza Ghaffarian Jet Propulsion Laboratory/ California Institute of Technology Prof. Farrokh Ayazi Georgia...

5.1 Introduction This chapter focuses on the research, development and design aspects, and performance capabilities of radio frequency microelectromechanical systems (RF-MEMS) switches operating at...

Ramesh Ramadoss, Auburn University, Auburn,, Alabama Robert Dean, Auburn University Auburn,, Alabama Xingguo Xiong, University of Bridgeport, Bridgeport,, Connecticut ABOUT THIS CHAPTER Since the...

8.1 Introduction This chapter will describe the performance capabilities of microelectromechanical systems (MEMS)-based and nanotechnology (NT)-based devices and sensors best suited for commercial,...