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MEMs for High Precision - That's SensonNor Technologies AS
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From Sensonor Technologies AS
During the past ten years, the MEMS sensor technology has played a more and more dominant role within automotive and consumer volume applications. The reason is obvious, and explained by the superior advantages of MEMS compared to conventional technologies: Lower cost due to wafer based high volume manufacturing technology; smaller size, lower weight and less power due to semiconductor technology; more robustness due to lower weight, higher electrical integration and less self generated heat. Products & Services
Pressure sensors include all sensors, transducers and elements that produce an electrical signal proportional to pressure or changes in pressure.
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Masayoshi Esashi,
New Industry Creation Hatchery Center (NICHe), Tohoku University
Japan
1 Introduction
MEMS (micro electromechanical systems) based on semiconductor microfabrication play...
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Adrian M. Ionescu,
Laboratoire d'Electronique G n rale, Institut de Micro lectronique et Microsyst mes, Ecole Polytechnique F d rale de Lausanne
Switzerland
1 Introduction
The end of the...
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1.1 Introduction
Microelectromechanical systems (MEMS) is an enabling technology that implements techniques similar to traditional integrated circuit fabrication processes to realize highly...
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Robert Aigner,
Infineon Technologies
Munich, , Germany
1 Introduction
A large number of MST/MEMS [1]-based products for automotive application have successfully entered the market during...
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6.1 Introduction
This chapter is exclusively dedicated to radio frequency (RF)/microwave microelectromechanical system (MEMS) phase shifters. Phase shifters can be classified into two categories:...
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