Mechanical components intended to run in clean rooms for wafer fabrication must comply with uniform industry standards that dictate the number and size of particles they can generate. Linear-position stages designed for clean rooms such as this unit from Primatics Corp., Corvallis, Oreg., must comply with FED STD 209E for particulate generation. For example, the PLG160 stage cannot produce more than 35 particles, 0.1 µm in diameter for a Class 1 clean room, and no more than one particle of 0.5 µm in diameter. As computer and electronics industries pack more circuits on semiconductor wafers, eliminating particles in the clean rooms where they are processed becomes more critical with each generation. In many wafer-processing environments, as well as in other clean rooms, mechanicalpositioning stages are large contributors to contamination. Sup-pliers are required to follow special design criteria that ensures a positioning stage's cleanliness according to certain standards. Clean rooms are classified as Class 1, 10, 100, 1000, 10000, and 100000 according to standard FED STD 209E. A Class 1 clean room,
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Linear thrusters use double-acting pneumatic cylinders or hydraulic cylinders mated to shafts and plates to provide reoccurring linear motion They are used in conveying, inspection systems, and lifting applications, or to apply thrust load
Linear Slides and Linear Stages
Linear slides are simple linear motion devices composed of a stationary base and a moving carriage. Linear stages are slides with a drive mechanism that provide controlled, precise positioning along a linear axis.
Air cylinders are pneumatic linear actuators that are driven by a pressure differential in the cylinder's chambers. They may be single-acting (with a spring return) or double-acting.
Hydraulic cylinders are actuation devices that utilize pressurized hydraulic fluid to produce linear motion and force.
Electric linear actuators have an output rod that provides linear motion via a motor driven ball screw, lead screw, or ACME screw assembly. The actuator's load is attached to the end of a screw or rod and is often unsupported.
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