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Measuring Micro-Lens Radius of Curvature with a White Light Optical Profiler

From Veeco Instruments
 

 

Microlenses are discrete or array-based spheres, aspheres and other optics used in a variety of applications, chiefly for focusing light into fibers for optical networking. Microlenses are typically 50µm - 5mm in diameter, with a radius of curvature (ROC) of 0.25 - 2.5mm. Controlling ROC is critical for properly focusing the beam on the fiber, and uniform ROC is necessary to minimize signal loss. Measuring ROC at production volumes is a challenging task; optical profiling provides the combination of speed, resolution and repeatability to serve this role.

Microlens arrays are created by etching or molding glass, silicon or plastic substrates. The lenses' ROC can vary across the substrate due to uneven resist thickness or changes in the reactive ion beam etching process. With ROC tolerances held to <10µm, even slight process variability can lead to substrate failure.

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