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Surface Measurement Parameters for Wyko Optical Profilers (AN505)

From Veeco Instruments
 

 

R Parameters were originally developed for two-dimensional, stylus type profiling applications. Many of these statistics were later adapted for three-dimensional use as well, for systems such as optical profilers which are capable of true 3D measurement.

Ra Roughness average is the main height as calculated over the entire measured length or area. It is quoted in micrometers or micro-inches. Ra is calculated per the ANSI B46.1 standard.
Rq The Root means square (rms) average between the height deviations and the mean line/surface, taken over the evaluation length/area. The parameters "RMS" and "Rq" are equivalent in Wyko® Vision® and are computed using the same equation.
Rp , Rv Maximum profile peak height and Maximum profile valley depth are the distances from the mean line/surface to the highest/lowest point in the evaluation length/area.
Rt Maximum height is the vertical distance between the highest and lowest points in the evaluation length/area.
Rz The Average maximum profile of the ten greatest peak-to-valley separations in the evaluation area. Vision excludes an 11 x 11 region around each high (H) or low (L) point such that all peak or valley points won't emanate from one spike or hole.

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