Semiconductor: Custom ECU for Semiconductor Process Equipment

The Challenge:

One of the biggest challenges in using lithography in high-volume semiconductor fabrication is photomask defectivity. A global supplier to the semiconductor and photomask making industries asked Air Innovations to create an environmental control unit (ECU) that could service — on demand — any of its nanomachining mask repair tool systems. Extremely tight tolerance was required for both temperature and humidity

The Solution:  Click here