Custom ECU for Semiconductor Process Equipment
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Semiconductor: Custom ECU for Semiconductor Process Equipment
The Challenge:
Custom ECU for Semiconductor Application
One of the biggest challenges in using lithography in high-volume semiconductor fabrication is photomask defectivity. A global supplier to the semiconductor and photomask making industries asked Air Innovations to create an environmental control unit (ECU) that could service — on demand — any of its nanomachining mask repair tool systems. Extremely tight tolerance was required for both temperature and humidity
The Solution: Click here
