VULCANO XYT Stacked Platform

Featured Product from ETEL S.A.


The VULCANO XYT platform is made up of the standard VULCANO XY outfitted with the RTTB rotary module which includes high resolution encoder coupled to an outstanding mechanical bearing.

The use of this platform is suitable for, but not limited to:

  • Wafer Process Control applications such as Overlay Metrology, Critical Dimension and Thin film Metrology
  • Back-end: specific flip-chip processes made on large panels/substrates

Characteristics

  • Compact footprint
  • Nanometer position stability
  • Short move and settle times
  • High dynamics
  • High bidirectional repeatability
  • High position stability
  • ISO class 1 clean room compatibility

Click here to see the VULCANO XYT Data sheet !

Click on the link below to watch the VULCANO movie !

About ETEL

ETEL, founded in 1974 and based in Switzerland, is a supplier 100% dedicated to direct drive technology. ETEL’s range of linear and torque motorsposition and motion controllers, and high-end motion system products provide a large selection to meet nearly all customers’ needs and providing them with process improvement they have been looking for.