VULCANO XYT Stacked Platform
Featured Product from ETEL S.A.
The use of this platform is suitable for, but not limited to:
- Wafer Process Control applications such as Overlay Metrology, Critical Dimension and Thin film Metrology
- Back-end: specific flip-chip processes made on large panels/substrates
- Compact footprint
- Nanometer position stability
- Short move and settle times
- High dynamics
- High bidirectional repeatability
- High position stability
- ISO class 1 clean room compatibility
Click here to see the VULCANO XYT Data sheet !
Click on the link below to watch the VULCANO movie !
ETEL, founded in 1974 and based in Switzerland, is a supplier 100% dedicated to direct drive technology. ETEL’s range of linear and torque motors, position and motion controllers, and high-end motion system products provide a large selection to meet nearly all customers’ needs and providing them with process improvement they have been looking for.