Inclinometer and Accelerometer MEMS Sensors

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The capacitive inclinometers and accelerometers are based on single crystal silicon sensor elements and utilize state-of-the-art micromachining technology to achieve large signal-to-noise ratios and excellent stability over temperature. Therefore, they are able to detect extremely small changes in inclination or acceleration. Due to high aspect ratio microstructures (HARMS) the sensors feature ultra-low cross axis sensitivities. Further, the patented highly flexible AIM (Air gap Insulated Microstructures) technology minimizes parasitic capacitances.

All inertial sensors are customizable and can be adapted or developed to fit specific requirements or applications.