HORIBA Vapor Concentration Monitor IR-300

Featured Product from HORIBA Instruments, Inc.

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The in-line IR-300 Series measures and reports the precursor concentration in real time giving the user the following benefits:

  • Optimise process control to produce more high-grade devices
  • Improve device yield and reduce scrap
  • Improve reproducibility
  • Know when a bubbler will require exchanging
  • Extend MTTA
  • Reduce unplanned interventions
  • Reduce valuable precursor waste

Metal-Organic Chemical Vapor Deposition (MOCVD) process is widely used in the manufacture of LEDs, optical devices and other components.