FT160 benchtop EDXRF for coating thickness

Featured Product from Hitachi High-Tech Analytical Science

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The FT160 is the latest generation of Hitachi coatings analyzers designed to meet the challenges of measuring ultra-thin coatings on small features.  The FT160 is a benchtop EDXRF (energy dispersive X-ray fluorescence) analyzer with powerful software and hardware created to deliver high sample throughput with quality results achieved by any operator.

Designed to play a key role in production quality control, the FT160 series measures a wide range of applications in the semiconductor, circuit board and electronics components markets.

Measure nm-scale coatings

The FT160 features high-end components to provide the ultimate analysis of ultra-thin coatings on fine structures.

  • A polycapillary optic focuses the X-ray beam down to a diameter of <30 µm, focusing more intensity on the sample and measuring features smaller than what is possible with traditional collimation.
  • A high sensitivity, high resolution Hitachi High-Tech silicon drift detector (SDD) takes full advantage of the optic to measure nm-scale coatings on microelectronics and semiconductors.
  • A high-precision stage and high definition camera with digital zoom allow for quick positioning of the sample features to improve sample throughput.