Hypersen Chromatic Confocal Sensor is a non-contact displacement sensor that measure object’s thickness, height and displacement at nanometer level. The measurement is not affected by the material, shape, color and reflection of the object to be measured. It can measure wafer thickness by double-side thickness measurement.

The whole sensor system consists of a sensor controller and one or more sensor heads.

Features:

• 72kHz sampling rate
• 0.04um static repeatability
• Non-contact measurement
• One controller can support up to 4 sensor heads simultaneously
• Perfect for transparent/translucent and highly reflective materials

Applications:

• Wafer thickness measurement
• Wafer warpage/flatness measurement

Delivery time:

Within 5 business days

Warranty:

Return policy; Long-term after-sales service and technical support

Carrier: DHL, UPS or others as you appoint

Classification: Liner Position Sensor