Direct drive rotary stage PSR150 features arc-sec precision and 300 rpm rotational speed. There is a large center aperture in the rotary stage for the  channel to pass user vacuum and electrical lines.

Designed for Clean Room Class 10 compatibility to transfer semiconductor wafers, gantry features sealed structure with high durability stainless steel strips, electro-less plating for corrosion resistance and vacuum suction ports to exhaust particles generated by the moving parts.

This gantry can also be supplied in cost effective version for general automation applications with larger strokes in custom configurations.

Matching motor controller with RS-232, USB, CAN-bus and Ethernet interfaces is available for seamless integration.

                                                      Specifications: