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Large Open Frame XY-Theta Integrated Stages

Featured Product from IntelLiDrives, Inc.

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Open-frame XY-Rotary stages designed with a low profile for wafer handling and many other automated accurate positioning applications in manufacturing industries. 

XY drive mechanism located on the side of the unit and large center hole-through rotary table offer a clear un-obstructed access to the wafer.

Matching motor controller with RS-232, USB, CAN-bus and Ethernet interfaces is available for seamless integration.

 Specifications:  

Parameter / Axis XY stage Rotary stage
travel range

200 x 200 mm

280 x 280 mm

350 x 350 mm

360 deg
resolution 1 micron 1 arc-sec
max speed 500 mm/sec 200 rpm
max load 25 Kg
center opening 160 ... 335 mm
axes

ball screw or

linear motor

direct drive rotary (DDR)