Large Open Frame XY-Theta Integrated Stages
Featured Product from IntelLiDrives, Inc.
Open-frame XY-Rotary stages designed with a low profile for wafer handling and many other automated accurate positioning applications in manufacturing industries.
XY drive mechanism located on the side of the unit and large center hole-through rotary table offer a clear un-obstructed access to the wafer.
Matching motor controller with RS-232, USB, CAN-bus and Ethernet interfaces is available for seamless integration.
Specifications:
Parameter / Axis | XY stage | Rotary stage |
travel range |
200 x 200 mm 280 x 280 mm 350 x 350 mm |
360 deg |
resolution | 1 micron | 1 arc-sec |
max speed | 500 mm/sec | 200 rpm |
max load | 25 Kg | |
center opening | 160 ... 335 mm | |
axes |
ball screw or linear motor |
direct drive rotary (DDR) |
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