XY-rotary systems for high precision clean room applications

The demand for a high accuracy stages is met with IntelLIDrives integrated XY-ROTARY system that addresses the needs of scanning microscopy, wafer and printed circuit board inspection, semiconductor manufacturing and many others where precision is important. 

Very precise fine positioning and control is easily achieved with servo controllers compatible with EtherCAT,  CANOpen, RS-232, USB, Ethernet/IP interfaces.

These stages fitted with DIRECT DRIVE LINEAR and ROTARY axis for smooth scanning applications as well for fast index motions with fast settling time.

High-resolution linear and rotary ring ABSOLUTE encoders offer exceptional repeatability and stability over a range of operating conditions. 

XY STROKE 100, 200, 300 mm

ROTATION 360 deg

XY REPEATABILITY 0.25 micron

ROTARY REPEATABILITY 0.5 arc-sec

RESOLUTION 0.1 micron

DIRECT DRIVE MOTORS

ABSOLUTE ENCODERS (all axis)