- Trained on our vast library of engineering resources.

High-purity pyrolytic graphite for Semiconductors

Featured Product from MINTEQ® International Inc, Pyrogenics Group

More Info Email Supplier Request a Quote

Typical Applications:

  • Ion Implantation Grids
  • Wafer Trays
  • Electrodes for Plasma Etch
  • Boats
  • Crucibles
  • Susceptors
  • Brazing and glass-to-metal sealing jigs


Extremely Pure Pyroid® Pyrolytic Graphite for Ion Implantation
Global semiconductor manufacturers use ion implantation in most of their chip production processes. Ion implantation uses two or three closely spaced multiple-aperture electrodes to extract ions from a source and eject them in a collimated beam. The electrodes are called "grids" because they are perforated with a large number of small holes in a regular array under close tolerance.

Ion impact erosion of the ion optics (i.e., the grids) is the primary mechanism limiting the life of the ion grids. The erosion of the grid eventually weakens it to the point that the grid fails and breaks causing unnecessary and costly production down time.

Pyrolytic Graphite exhibits the lowest erosion rate of any known material, even in extreme working conditions such as in ion bombardment or in plasma applications.

Common grid material parts such as molybdenum and other fine-grain, high-desity graphite used in ion implantation equipment have very high erosion wear rates. Pyrolytic graphite has extremely low erosion rates due to its high purity > 99.999% and single crystal structure.

Customers using pyrolytic graphite grids for ion implantation enjoy a reduced cost of ownership due to the low erosion rates of the material. This is important since it improves productivity by enabling the user to operate longer without tooling changes and the associated costs of downtime during the tooling change over.

Technical Papers

Minteq Pyrogenics Group
py•ro - (pi'• ro) prefix fr. Gk, Pyros, fire
gen•ic - (jen'• ik) a. source

The Pyrogenics Group is the technological leader in the production of engineered carbon based products for key industries requiring innovative material solutions.

These high-purity products offer unique thermal and physical properties that provide customer benefits in the form of extremely rapid thermal heat transport or heat spreading.

The Pyrogenics Group had its origins in the Space Age Materials Corporation (SAMCO), a research and development organization that focused on high-temperature materials and coatings for use in military and aerospace applications.

The production facility of The Pyrogenics Group is in Easton, Pennsylvania, a 90 minute drive from Philadelphia and New York City. The multi-building complex houses a variety of high temperature equipment including two-story production furnaces capable of producing Pyroid® pyrolytic graphite material from 0.001 to 1 inches thick (0.0025 to 2.5 cm), lengths over 48" long (120 cm), and widths up to 24" wide (60 cm).  Additional medium-sized furnaces and small pilot furnaces are available for lower production volumes or small scale prototype work.

Our furnaces are used on a regular basis for Chemical Vapor Infiltration (CVI) of pyrolytic carbon into carbon-carbon composites and special pyrolytic carbon coatings, and Chemical Vapor Deposition (CVD), on graphite or similar substrates.

We are supported by a ISO certified, full-service, analytical lab for product certification and our CNC machine shop is fully equipped to finish every order to the customer's demanding tolerance specifications and quality requirements.