High-Speed NanoCube 3-Axis Piezo Motion Stage

Featured Product from PI (Physik Instrumente) L.P.


The new P-616 NanoCube® XYZ piezo scanner is a redesign of PI's successful P-611, 3D positioning stage. Now based on a parallel-kinematic design, with only one lightweight moving platform for all 3 axes, higher precision and dynamics are available in a more compact package. As the newest miniature multi-axis stage from PI, the P-616 NanoCube is also the smallest and lightest system with capacitive feedback delivering 100µm travel range.

Digital Controller for Higher Speed, Improved Linearity
The positioner is operated with PI's new E-727 digital servo piezo controller. Compared to conventional analog piezo controllers, it offers the advantage of higher linearity, faster settling and scanning speed, and easy access to all motion parameters. An all-inclusive software package is included: drivers for LabVIEW, dynamic libraries for Windows and Linux, MATLAB. Interfaces consist of USB, SPI, RS-232, and analog. Supported functions include Wave generator, data recorder, auto zero, and trigger I/O.

Watch Background Video on Piezo Flexure Nanopositioners

Long-Life Piezo Drives
The XYZ stage is driven by ceramic-encapsulated, preloaded PICMA® piezo actuators that provide better performance and reliability than conventionally insulated piezo actuators. Actuators, guidance, and sensors are maintenance-free, not subject to wear, and offer extraordinary lifetime and cost-effectiveness. In reliability tests carried out by NASA/JPL for the Mars Mission, the actuators survived 100 billion cycles without failures.

Applications of the NanoCube
Fields of applications include photonics alignment, microscopy, 3D imaging, screening, surface analysis, and wafer inspection.

Features & Advantages

  • High-Speed XYZ Scanner
  • Millisecond Step & Settle
  • 100µm Travel Ranges in XYZ
  • Capacitive Feedback for Sub-nm Resolution

Standard and Custom
PI has in-house engineered solutions with over 4 decades of experience working with customers to provide products that meet application demands, and can quickly modify existing product designs or provide a fully customized OEM part to fit the exact requirements of the application.

PI (Physik Instrumente) provides the broadest and deepest portfolio of precision motion technologies in the world. PI USA complies with the US laws for export controlled technologies.
PI is a leading manufacturer of precision motion control equipment, piezo motors, air bearing stages and hexapod parallel-kinematics for semiconductor applications, photonics, bio-nano-technology and medical engineering. PI has been developing and manufacturing standard & custom precision products with piezoceramic and electromagnetic drives for 4 decades. The company has been ISO 9001 certified since 1994 and provides innovative, high-quality solutions for OEM and research. PI is present worldwide with eight subsidiaries, R&D / engineering on 3 continents and total staff of 800+.