Vacuum-Compatible Positioning Solutions

Featured Product from PI (Physik Instrumente) L.P.

PI HV / UHV Motorized Stages: Vacuum-Compatible Positioning Solutions
What’s vital for humans can be detrimental for technology. The advancement of photonics, semiconductor, laser manufacturing technologies sees an increase of applications that require the use of vacuum-compatible equipment and environments with extremely low pressures down to 10exp-9 mbar and below. The same is true for big science research, as found in beamline facilities. High precision positioning and motion control equipment is key to progress of the above applications – but what works well in atmospheric environments can be a show stopper for vacuum applications. Good lubrication, a prerequisite to long life of any motion component takes on a whole new dimension in vacuum, as the use of conventional grease and oil cause problems with outgassing.

In order to maintain precision and reliability— the two key factors to the success of industrial processing — motion and positioning equipment has to be designed accordingly. These properties are entwined in ongoing quality assurance and process control. Reliability is key for any industrial manufacturing process and maintaining stringent accuracy levels over time minimizes margins of error and increases overall yield. This focus has been one of the driving forces behind the intensive development of motorized precision positioning equipment such as linear and rotary nanopositioning stages in recent history.

The ability to adjust the position of components / workpieces with nanoscale precision, repeatedly through extensive use cycles, is relevant to a diverse range of fields including atomic force microscopy (AFM), optical metrology and semiconductor manufacturing. Motorized positioning stages can now satisfy the extreme sensitivity demands of even the most challenging application more....



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About PI
PI is a leading manufacturer of air bearing stages, piezoelectric solutions, precision motion control equipment, and hexapod parallel-kinematics for semiconductor applications, photonics, bio-nano-technology and medical engineering. PI has been developing and manufacturing standard & custom precision products with piezoceramic and electromagnetic drives for 4 decades. The company has been ISO 9001 certified since 1994 and provides innovative, high-quality solutions for OEM and research. The PI group employs more than 1,000 people worldwide in 15 subsidiaries and R&D / engineering centers on 3 continents.