Hexoloy® SG SiC for DC Magnetron Sputtering

Product Announcement from Saint-Gobain High Performance Ceramics, Refractories and Hexoloy® Products

Semiconductor Hexoloy® SG SiC for DC Magnetron Sputtering

Hexoloy SG SiC is a unique electrically conductive analog of sintered silicon carbide that can be readily DC magnetron sputtered. Hexoloy SG SiC features high density and uniform electrical resistivity, less than 5 ohm-cm. It can be sputtered at high deposition rates compared to other ceramic target sources, with controllable thin film optical properties.

Hexoloy SG SiC offers a wide variety of desirable properties:

  • Excellent hardness
  • Corrosion resistance
  • High temperature stability
  • Excellent film adhesion