High Cleanliness Vacuum Linear Motors

Featured Product from Tecnotion


A direct sibling of our U-series, these vacuum rated ironless motors feature specifically designed coil units and magnet yokes for use in high vacuum, down to 10-8 mBar.

Apart from the features carried over from our regular ironless motors: light weight and ultra-precision, this series is also capable of incredibly smooth motion and achieves the lowest amount of outgassing possible for a series product of this type. The importance of low outgassing can be so crucial for certain applications, that we had this thoroughly tested and can even supply you with exact specifications and performance details, should you so desire.

Thermal management is one of the main challenges in vacuum. Therefore the coil units have been designed to achieve a low thermal resistance (Rth) to enable the coil unit to quickly conduct heat away from the coil. Integrated temperature and cut-off sensors guarantee thermal protection at all times.

KEY INDUSTRIES THAT CAN BENEFIT FROM THESE MOTORS ARE, FOR INSTANCE:

  • Semiconductor
  • Flat Panel Display
  • Inspection stages
  • Lithography
  • E-beam / ion beam applications

SO WHY CHOOSE FOR IRONLESS VACUUM RATED?

  • Defined low outgassing
  • No particulation
  • High cleanliness
  • No large cable feed-through required
  • Can be positioned anywhere in the vacuum chamber.