Machining of AlN (Aluminum Nitride)
Service Detail from Top Seiko Co., Ltd.
Aluminum Nitride is a material that has heat resistance, high thermal conductivity, dielectricity, piezoelectricity, low thermal expansion, and so on. Because of those properties, this material is often used for heat sinks, heaters, substrates, and so on. For example, we machine it into a part for semiconductor manufacturing devices or ESC for CVD devices.
You would find more details and samples of AlN here.
|Thermal Shock Resistance||400°C|
|Thermal conductivity||170~200 W/(m.K)|
|Thermal expansion coefficient||2.4 x 106|
|Specific gravity (density)||3.3|
|Hardness||Hv 13 GPa|
- ALN substrate
- ALN heat sink
- ALN pipe
- ESC for CVD devices
- high frequency printed circuit board
- power mudule substrate
- electrostatic chucks
- clamp ring
- parts for high thermal conductivity is essential