Series 010 Mini UHV Gate Valve

Product Announcement from VAT, Inc.

Series 010 Mini UHV Gate Valve-Image

The compact mini UHV gate valve featuring a modular actuator concept is well suited for industrial and R&D applications. It is often used in pipings of semiconductor process systems.

Mini-UHV-gate valves are for many applications. They can be provided with various actuators. The mechanism is free of lubricants.


Nominal inside diameters (ID): 25 (1") - 50 (2")

Body material: Stainless steel

Actuator types: Manual actuator (hand wheel), Pneumatic actuator (double acting), Pneumatic actuator (single acting with closing spring NC)

Feedthrough: Bellow

Sealing technology: MONOVAT-System

Sealing materials: Bonnet: Metal / Gate: FKM (VITON®)

Cycles until first service: 50'000 cycles

Leak rate: Body: < 5 . 10-10 mbar ls-1 ; Valve seat: < 1 . 10-9 mbar ls-1