Optical Mirrors

Featured Product from Zygo Corporation


ZYGO's Optics business segment manufactures precision optical mirrors to exacting standards.

Applications

ZYGO has a long tradition of manufacturing custom-made optical mirrors for a wide variety of applications, including, but not limited to:

  • EUV mirrors
  • Lightweighted mirrors
  • Space mirrors
  • Stage components for lithographic steppers
  • X-ray mirrors
  • Defense/Aerospace
  • Medical/Life sciences
  • Industrial OEM
  • Intelligence, surveillance & reconnaissance (ISR)

Key Features

  • Geometry (flats, spheres, aspheres) to better than λ/50 PV.
  • Full aperture interferometry up to 32" for flats, and up to 12" for spheres/aspheres (larger with stitching).
  • Surface Roughness < 1 nm rms.

Materials

ZYGO has the capability to process a wide range of materials for optical mirrors. Our product capabilities include:

  • CLEARCERAM® mirrors
  • Cordierite mirrors
  • Silicon Carbide mirrors
  • Silicon mirrors
  • ULE® mirrors
  • Zerodur® mirrors

Types

ZYGO produces a variety of types high quality custom optical mirrors, including:

  • Aspheric mirrors
  • EUV Mirrors
  • Flat mirrors
  • Light-Weighted Mirrors
  • Monolithic Mirrors
  • Off-axis mirrors
  • Parabolic mirrors
  • Spherical mirrors