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  • MICRO:Product Technology News (March '99)
    modular design combines cleanroom engineering, robotic handling, and SECS/GEM communications. A linear encoded sample stage has a resolution of 0.25 um and a pattern recognition system for automatic alignment, positioning repeatability, and high throughput. The SoftScan low-inertia sensor enables
  • MICRO: Advanced Process/Equipment Control
    to providing the same kind of factory control information as the SECS/GEM interface, the new standards can support the collection of detailed sensor and operational data at the bandwidths needed for on-line monitoring and diagnostics (e.g., 1000 scalar values per tool and a total of 10,000 samples per second

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