Dielectric / Ceramic Thin Film Equipment Datasheets
from ULVAC Technologies, Inc.
The EX/EBX Series are batch-type high-vacuum evaporation systems created using the benefits of ULVAC's many years of evaporation system technology and experience. ULVAC has released many systems for opto-device soldering and electrode multilayer deposition of compound semiconductors. The EX/EBX... [See More]
- Materials Processed: Aluminum; Metal; Dielectric or Ceramic; Oxides; Nitrides; ITO, Sulfides
- Process: Physical Vapor Deposition; Resistance Evaporation; Electron Beam Evaporation; Plasma Etching and Cleaning (optional feature)
- Type: Batch
- Applications: Flat Panel Display; Optical Coatings; Photovoltaic or solar cell; Research / Surface Analysis; Semiconductors; Magnetic storage; Production