Batch System (Single Chamber / Multiple Wafers) MEMS Processing Equipment

Multi-purpose Vacuum Box Coating Systems -- UNIVEX 400
from Leybold USA Inc.

UNIVEX 400. The UNIVEX 400 is a compact coating system for laboratory tasks, respectively pilot production runs. Due to its chamber dimensions, it is ideal for coating of small to medium sized substrates. In the vacuum chamber which is 420 mm wide, substrates respectively substrate holders up to an... [See More]

  • Type: Batch; Free Standing System
  • Applications: MEMS; Optical Coatings; Photovoltaic or solar cell; Semiconductors
  • Process: Physical Vapor Deposition; Resistance Evaporation (optional feature); DC Magnetron Sputtering (optional feature); Ion Beam Assisted Deposition (optional feature)
  • Materials Processed: Metal; Polymer; Gallium Arsenide or Compound Semiconductors
Precision Oscillating Head Polishing Machine -- LLCD Optical
from Precision Surfacing Solutions

To complement our extensive range of Single and dual face lapping and polishing machines Lapmaster has introduced a new line of precision oscillating head polishing machines. Designated the LLCD series they are, primarily, Microprocessor controlled pad polishing machines specially designed for... [See More]

  • Type: Batch; Continuous Web or Wire Coater; Inline or Semicontinuous
  • Applications: Flat Panel Display; MEMS; Optical Coatings; Semiconductors; Magnetic storage
  • Process: Polishing, Lapping, Planarizing
  • Materials Processed: Metal; Silicon; Dielectric or Ceramic; Oxides; Glass Substrates