Cluster Tool (Multi-Chamber / Single Wafer) MEMS Processing Equipment Datasheets

from ULVAC Technologies, Inc.

This system incorporated technology of high-speed silicon etching. The model range are available from prototypes for R &D to multi-chamber types for mass-production. [See More]

  • Type: Batch (optional feature); Cluster Tool (optional feature)
  • Applications: MEMS; Research / Surface Analysis; Semiconductors
  • Process: Plasma Etching and Cleaning
  • Wafer / Part Size: 200