Applications:Other Wafer and Thin Film Instrumentation Datasheets

Ascent® DMS Advanced Dual-Magnetron Sputtering
from Advanced Energy Industries, Inc.

The Ascent ® DMS series offers unprecedented power-delivery ease and control for dual-magnetron sputtering, enabling precise tuning of film characteristics. With selectable frequency, regulation mode, and duty cycle, as well as low stored energy and simplified, modular system configuration, the... [See More]

  • Applications: Wafer; Magnetron Sputtering
  • Mounting / Loading: Floor
  • Form Factor: Controller
Metrology Solutions for Semiconductors
from Bruker Corporation

Bruker Semiconductor develops, manufactures, markets, and supports metrology solutions for thin films, which are based on novel, rapid, non-contacting and non-destructive X-ray technology. With Bruker ™s acquisition of Jordan Valley Semiconductors, a name synonymous with unparalleled worldwide... [See More]

  • Applications: Wafer; C-S Thin Film Materials
  • Measurements: Defects, dimples or film residues (optional feature); Roughness / Waviness (optional feature)
  • Technology: Profilometer or AFM (optional feature); X-ray Diffractometer (optional feature)
Advanced Langmuir Probe -- ESPion
from Hiden Analytical

The ESPion advanced Langmuir probe for rapid, reliable and accurate plasma diagnostics for industry and academia. [See More]

  • Applications: Etching; Ion/Electron Collection, Ion Flux
  • Mounting / Loading: In-process, in-situ or system mounted
  • Form Factor: Controller; ProbingSystem
  • Technology: Spectrometer (SIMS, XRF, FTIR, DLTS, AAS)
from Imego

MERMAID is a unique measurement instrument for analysis of liquid and thin film properties using magnetoelastic resonance (MER) sensors. Dynamic events such as viscosity change, phase transitions or bio film growth can be analyzed. The MER sensor can measure properties of either a coating on top of... [See More]

  • Applications: CVD / PVD; Polymer or photoresist films; BioFilms
  • Mounting / Loading: In-process, in-situ or system mounted; Floor
  • Form Factor: ProbingSystem; Sensor or sensing element
  • Technology: Quartz crystal microbalance; Magnetoelastic Resonance Sensors (MER)
from KLA-Tencor Corporation

EtchTemp, the next-generation in-situ plasma etch wafer temperature measurement product, captures the effect of the process environment on production wafers and offers unique new capabilities to robustly characterize the high-power, high-frequency etch wafer recipes proliferating at 65nm nodes and... [See More]

  • Applications: Wafer; Temperature
  • Mounting / Loading: In-process, in-situ or system mounted
  • Form Factor: Sensor or sensing element
  • Technology: 65-Point Temperature Sensorwafer
Micro System Analyzer -- MSA-500
from Polytec, Inc.

The MSA-500 Micro System Analyzer is the premier measurement technology for the analysis and visualization of structural vibrations and surface topography in micro structures such as MEMS (Micro-Electro-Mechanical Systems) devices. By fully integrating a microscope with Scanning Laser-Doppler... [See More]

  • Applications: Surface Topography
  • Mounting / Loading: Manual loading
  • Form Factor: Sensor or sensing element
  • Technology: Optical / Imaging; Laser Doppler Vibrometry
Thin-Film Measuring Systems -- TF Series
from StellarNet, Inc.

TF Systems for Non-Contact Film Thickness Measurements. We offer a complete line of film thickness measurement systems that can measure from 5 nm to 200 ┬Ám for analysis of single layer and/or multilayer films in less than a second. StellarNet thin film reflectometry systems consist of a portable USB... [See More]

  • Applications: Wafer (optional feature); Memory drive disc or head (optional feature); CVD / PVD (optional feature); Flat panel display (optional feature); Optical components or lenses (optional feature); Polishing / CMP (optional feature); Polymer or photoresist films (optional feature); Thin-Film Photovoltaics
  • Mounting / Loading: In-process, in-situ or system mounted
  • Form Factor: Monitor or instrument
  • Technology: Reflectometer
Laser Diode Bar Tester
from TELOPS, Inc.

The laser diode bar tester picks up each laser diode bar from the tape and measures LIV, wavelength and FFP characteristics for each die. [See More]

  • Applications: Packaged IC or substrate; Optical components or lenses; Laser Diode Bar Tester
  • Mounting / Loading: Floor
  • Form Factor: Monitor or instrument; ProbingSystem
  • Technology: Optical / Imaging; IV system or SMU; Wafer sorter or prober
Laser Machining Microscope -- MIC4
from WDI Wise Device Inc.

This is the only commercially available microscope guaranteeing transmission of more then 80% for all four YAG laser harmonics: 266, 355, 532, and 1064nm - without compromising the review channel fidelity. The MIC4 microscope is instrumental in laser repair of TFT arrays over the wavelength ranging... [See More]

  • Applications: CVD / PVD; Electroplate; Flat panel display; Packaged IC or substrate; Optical components or lenses; Photolithography; PV Cell, Laser Micromachining, Photomask
  • Mounting / Loading: In-process, in-situ or system mounted (optional feature); Floor (optional feature)
  • Form Factor: Monitor or instrument
  • Technology: Optical / Imaging