Reflectometer Thin Film Monitors Datasheets

Aleris Family -- 8330
from KLA-Tencor Corporation

The Aleris Family of film metrology tools provides reliable and precise measurement of film thickness, refractive index, stress and composition for the 32nm node and beyond. Utilizing Broadband Spectroscopic Ellipsometry (BBSE) technology, the Aleris systems form a comprehensive metrology solution,... [See More]

  • Technology: Reflectometer
  • Applications: CVD / PVD
  • Mounting / Loading: Floor
  • Measurements: Composition (optional feature); FilmThickness; Refractive Index
Thin-Film Measuring Systems -- TF Series
from StellarNet, Inc.

TF Systems for Non-Contact Film Thickness Measurements. We offer a complete line of film thickness measurement systems that can measure from 5 nm to 200 ┬Ám for analysis of single layer and/or multilayer films in less than a second. StellarNet thin film reflectometry systems consist of a portable USB... [See More]

  • Technology: Reflectometer
  • Applications: Wafer (optional feature); Memory drive disc or head (optional feature); CVD / PVD (optional feature); Flat panel display (optional feature); Optical components or lenses (optional feature); Polishing / CMP (optional feature); Polymer or photoresist films (optional feature); Thin-Film Photovoltaics
  • Mounting / Loading: In-process, in-situ or system mounted
  • Measurements: FilmThickness (optional feature); WaferThickness (optional feature)
Texture Measurement System -- Microscan
from ULVAC Technologies, Inc.

Provides a broad range of specs suitable for various R & D applications [See More]

  • Technology: Reflectometer; Optical / Imaging
  • Applications: Wafer; CVD / PVD
  • Mounting / Loading: In-process, in-situ or system mounted
  • Measurements: Defects, dimples or film residues; FilmThickness; Roughness / Waviness